Invention Description The demand for advanced thin-film deposition techniques has grown substantially in recent years, driven by the development of next-generation electronic, optoelectronic, and energy devices. Traditional deposition methods, such as chemical vapor deposition, molecular beam epitaxy, and physical vapor deposition, have well-established...

Background Perovskites have widely been considered as promising next-generation materials for future display and solid-state lighting applications. Most current perovskite LEDs are produced using solution processing, and over 20% external quantum efficiencies (EQE) in LEDs have been achieved in recent studies. Vacuum-based deposition has also attracted...